Fabrication of nano-sized metal patterns on flexible polyethylene-terephthalate substrate using bi-layer nanoimprint lithography

被引：27

作者：

Hwang, Seon Yong ^{[1
]}

Jung, Ho Yong ^{[1
]}

Jeong, Jun-Ho ^{[2
]}

Lee, Heon ^{[1
]}

机构：

[1] Korea Univ, Dept Mat Sci & Engn, Seoul 136701, South Korea

[2] Korea Inst Machinery & Mat, Nanomech Syst Res Ctr, Taejon 305343, South Korea

来源：

THIN SOLID FILMS | 2009年 / 517卷 / 14期

关键词：

Metal nano-pattern; Flexible substrate; PET (polyethylene-terephthalate); PVA (poly-vinyl alcohol); Bi-layer imprint; NM HALF-PITCH; IMPRINT LITHOGRAPHY; FILM; DEVICES;

D O I：

10.1016/j.tsf.2009.01.164

中图分类号：

T [工业技术];

学科分类号：

120111 [工业工程];

摘要：

Polymer films are widely used as a substrate for displays and for solar cells since they are cheap, transparent and flexible, and their material properties are easy to design. Polyethylene-terephthalate (PET) is especially useful for various applications requiring transparency, flexibility and good thermal and chemical resistance. In this study, nano-sized metal patterns were fabricated on flexible PET film by using nanoimprint lithography (NIL). Water-soluble poly-vinyl alcohol (PVA) resin was used as a planarization and sacrificial layer for the liftoff process. as it does not damage the PET films and can easily be etched off by using oxygen plasma. NIL was used to fabricate the nano-sized patterns on the non-planar or flexible substrate. Finally, a nano-sized metal pattern was successfully formed by depositing the metal layer over the imprinted resist patterns and applying the lift-off process, which is economic and environmentally friendly, to the PET films. (C) 2009 Elsevier B.V. All rights reserved.

引用

页码：4104 / 4107

页数：4

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