Stability of field emission current from boron-doped diamond thin films terminated with hydrogen and oxygen

被引:15
作者
Nagao, M
Kondo, T
Gotoh, Y
Tsuji, H
Ishikawa, J
Miyata, K
Kobashi, K
机构
[1] KOBE STEEL LTD, ELECT & INFORMAT TECHNOL LAB, NISHI KU, KOBE, HYOGO 65122, JAPAN
[2] KYOTO UNIV, VENTURE BUSINESS LAB PROJECT, KYOTO, JAPAN
来源
JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS & EXPRESS LETTERS | 1997年 / 36卷 / 9AB期
关键词
vacuum microelectronics; field emission; emission stability; diamond; chemical vapor deposition; flicker noise; noise power; H-terminated surface; O-terminated surface;
D O I
10.1143/JJAP.36.L1250
中图分类号
O59 [应用物理学];
学科分类号
摘要
The stability of field emission current from B-doped diamond thin films terminated with hydrogen and oxygen mas measured to investigate the influence of the surface treatment and the dopant concentration on the emission stability. The diamond films sere prepared by microwave plasma chemical vapor deposition. The O-termination was performed by acid cleaning in boiling chromic acid and boiling aqua regia, The H-termination was performed by exposing the above sample to hydrogen plasma. The dependence of the emission stability on the B2H6 gas (dopant gas) concentration and the surface treatment Ras investigated. As a result, Little dependence on the B concentration nas observed, but dependence on the surface treatment was significant. The field emission of the H-terminated diamond thin films was confirmed to be more stable than the O-terminated films.
引用
收藏
页码:L1250 / L1253
页数:4
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