Laser patterning of metallic films via buffer layer

被引：22

作者：

Kerner, G

Asscher, M ^{[1
]}

机构：

[1] Hebrew Univ Jerusalem, Dept Phys Chem, IL-91904 Jerusalem, Israel

[2] Hebrew Univ Jerusalem, Farkas Ctr Light Induced Proc, IL-91904 Jerusalem, Israel

来源：

SURFACE SCIENCE | 2004年 / 557卷 / 1-3期

基金：

以色列科学基金会;

关键词：

growth; laser methods; laser induced thermal desorption (LITD); second harmonic generation methods; second harmonic generation; metallic films;

D O I：

10.1016/j.susc.2004.02.039

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

A novel method is presented for a single pulse laser-patterning of variable width conducting lines on solid surfaces. Employing laser induced thermal desorption (LITD), potassium coverage grating on top of multilayer Xe is formed on Ru(0 0 1) at 20 K. Optical second harmonic-diffraction measurements were performed to characterize the grating as a function of Xe layer thickness and laser power density. Upon annealing to 80 K, the Xe layer desorbs and the metallic pattern softly lands on the substrate. The potential application of this procedure for the parallel writing of conducting wires millimeters long and less than 50 nm wide is discussed. (C) 2004 Elsevier B.V. All rights reserved.

引用

页码：5 / 12

页数：8

共 23 条

[21] Diffusion of potassium on Re(001) investigated by coverage grating-optical second-harmonic diffraction [J].