Magnetic properties of ZnMnO films grown at low temperature by atomic layer deposition

被引：39

作者：

Wojcik, A.

Kopalko, K.

Godlewski, M.

Guziewicz, E.

Jakiela, R.

Minikayev, R.

Paszkowicz, W.

机构：

[1] Polish Acad Sci, Inst Phys, PL-02668 Warsaw, Poland

[2] Cardinal S Wyszynski Univ, Dept Math & Nat Sci, Coll Sci, Warsaw, Poland

来源：

APPLIED PHYSICS LETTERS | 2006年 / 89卷 / 05期

关键词：

D O I：

10.1063/1.2245209

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

The authors demonstrate that by lowering deposition temperature of ZnMnO films (T < 500 degrees C) they can avoid Mn clustering and creation of inclusions of Mn oxides, which are frequently formed in ZnMnO layers grown by high temperature methods. Low temperature growth is achieved using atomic layer deposition and organic zinc and manganese precursors.

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页数：3

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