First application of Cc-corrected imaging for high-resolution and energy-filtered TEM

被引:86
作者
Kabius, Bernd [1 ]
Hartel, Peter [2 ]
Haider, Maximilian [2 ]
Mueller, Heiko [2 ]
Uhlemann, Stephan [2 ]
Loebau, Ulrich [2 ]
Zach, Joachim [2 ]
Rose, Harald [3 ]
机构
[1] Argonne Natl Lab, Argonne, IL 60439 USA
[2] CEOS GmbH, D-69126 Heidelberg, Germany
[3] Tech Univ Darmstadt, D-64289 Darmstadt, Germany
来源
JOURNAL OF ELECTRON MICROSCOPY | 2009年 / 58卷 / 03期
关键词
aberration correction; chromatic aberration; oxides; EFTEM; HRTEM;
D O I
10.1093/jmicro/dfp021
中图分类号
TH742 [显微镜];
学科分类号
摘要
Contrast-transfer calculations indicate that C-c correction should be highly beneficial for high-resolution and energy-filtered transmission electron microscopy. A prototype of an electron optical system capable of correcting spherical and chromatic aberration has been used to verify these calculations. A strong improvement in resolution at an acceleration voltage of 80 kV has been measured. Our first C-c-corrected energy-filtered experiments examining a (LaAlO3)(0.3)(Sr2AlTaO6)(0.7)/LaCoO3 interface demonstrated a significant gain for the spatial resolution in elemental maps of La.
引用
收藏
页码:147 / 155
页数:9
相关论文
共 22 条
[1]  
*AB CORR EL MICR M, 2000, 1 TEAM WORKSH ARG NA
[2]  
*BESAC, 2000, REV EL BEAM MICR CTR
[3]   There's plenty of room at the bottom [J].
Feynman, Richard P. .
Journal of Microelectromechanical Systems, 1992, 1 (01) :60-66
[4]   Prerequisites for a Cc/Cs-corrected ultrahigh-resolution TEM [J].
Haider, M. ;
Mueller, H. ;
Uhlemann, S. ;
Zach, J. ;
Loebau, U. ;
Hoeschen, R. .
ULTRAMICROSCOPY, 2008, 108 (03) :167-178
[5]   Electron microscopy image enhanced [J].
Haider, M ;
Uhlemann, S ;
Schwan, E ;
Rose, H ;
Kabius, B ;
Urban, K .
NATURE, 1998, 392 (6678) :768-769
[6]   Crystal structure, thermal and magnetic properties of La3Co3O8.: Phase relations for LaCoO3-δ (0.00≤δ≤0.50) at 673 K [J].
Hansteen, OH ;
Fjellvag, H ;
Hauback, BC .
JOURNAL OF MATERIALS CHEMISTRY, 1998, 8 (09) :2081-2088
[7]   Novel Aberration Correction Concepts [J].
Kabius, Bernd ;
Rose, Harald .
ADVANCES IN IMAGING AND ELECTRON PHYSICS, VOL 153, 2008, 153 :261-281
[8]   Detection of single atoms and buried defects in three dimensions by aberration-corrected electron microscope with 0.5-Å information limit [J].
Kisielowski, C. ;
Freitag, B. ;
Bischoff, M. ;
van Lin, H. ;
Lazar, S. ;
Knippels, G. ;
Tiemeijer, P. ;
van der Stam, M. ;
von Harrach, S. ;
Stekelenburg, M. ;
Haider, M. ;
Uhlemann, S. ;
Mueller, H. ;
Hartel, P. ;
Kabius, B. ;
Miller, D. ;
Petrov, I. ;
Olson, E. A. ;
Donchev, T. ;
Kenik, E. A. ;
Lupini, A. R. ;
Bentley, J. ;
Pennycook, S. J. ;
Anderson, I. M. ;
Minor, A. M. ;
Schmid, A. K. ;
Duden, T. ;
Radmilovic, V. ;
Ramasse, Q. M. ;
Watanabe, M. ;
Erni, R. ;
Stach, E. A. ;
Denes, P. ;
Dahmen, U. .
MICROSCOPY AND MICROANALYSIS, 2008, 14 (05) :469-477
[9]   Imaging columns of the light elements carbon, nitrogen and oxygen with sub Angstrom resolution [J].
Kisielowski, C ;
Hetherington, CJD ;
Wang, YC ;
Kilaas, R ;
O'Keefe, MA ;
Thust, A .
ULTRAMICROSCOPY, 2001, 89 (04) :243-263
[10]   THEORY OF IMAGE-FORMATION BY INELASTICALLY SCATTERED ELECTRONS IN THE ELECTRON-MICROSCOPE [J].
KOHL, H ;
ROSE, H .
ADVANCES IN IMAGING AND ELECTRON PHYSICS, 1985, 65 :173-227