Combined optical and spatial modulation THz-spectroscopy for the analysis of thin-layered systems

被引：23

作者：

Brucherseifer, M ^{[1
]}

Bolivar, PH ^{[1
]}

Kurz, H ^{[1
]}

机构：

[1] Rhein Westfal TH Aachen, Inst Halbleitertech, D-52056 Aachen, Germany

来源：

APPLIED PHYSICS LETTERS | 2002年 / 81卷 / 10期

关键词：

D O I：

10.1063/1.1505118

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

We present a combined optical and spatial modulation technique to enhance drastically the resolution threshold of time-domain THz spectroscopy. By this approach, relative changes of THz transmission can be resolved down to unprecedented values of -90 dB, enabling the broadband analysis of extremely thin layered systems. The system capabilities are demonstrated by characterizing dielectric films, specifically a 1.2 mum thick polymer and a 100 nm thick SiO2 film. (C) 2002 American Institute of Physics.

引用

页码：1791 / 1793

页数：3

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