Laser texturing of glass disk substrates

被引：15

作者：

Tam, AC

Brannon, J

Baumgart, P

Pour, IK

机构：

[1] IBM Corporation, San Jose, CA 95120-6099

来源：

IEEE TRANSACTIONS ON MAGNETICS | 1997年 / 33卷 / 05期

关键词：

D O I：

10.1109/20.617884

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Infrared laser pulses of microsecond duration derived from a stabilized carbon dioxide laser are used to produce a textured zone on a glass disk substrate. Each laser pulse can produce a microscopically smooth dome-shaped bump that protrudes from the initial disk surface. Typical bump heights of interest are 20-30 nm with bump diameters similar to 10 mu m. The laser-textured zone, composed of similar to 10(5) bumps, provides a dedicated region for contact start/stop. The zone exhibits excellent tribological properties (stiction and durability).

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收藏

页码：3181 / 3183

页数：3

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