Scanning Michelson interferometer for imaging surface acoustic wave fields

被引：153

作者：

Knuuttila, JV ^{[1
]}

Tikka, PT ^{[1
]}

Salomaa, MM ^{[1
]}

机构：

[1] Aalto Univ, Phys Mat Lab, FIN-02015 Espoo, Finland

来源：

OPTICS LETTERS | 2000年 / 25卷 / 09期

关键词：

D O I：

10.1364/OL.25.000613

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

A scanning homodyne Michelson interferometer is constructed for two-dimensional imaging of high-frequency surface acoustic wave (SAW) fields in SAW devices. The interferometer possesses a sensitivity of similar to 10(-5) nm/root Hz and it is capable of directly measuring SAWs with frequencies ranging from 0.5 MHz up to 1 GHz. The fast scheme used for locating the optimum operation point of the interferometer facilitates high measuring speeds, up to 50,000 points/h. The measured field image has a lateral resolution of better than 1 mu m. The fully optical noninvasive scanning system can be applied to SAW device development and research, providing information on acoustic wave distribution that cannot be obtained by merely electrical measurements. (C) 2000 Optical Society of America.

引用

页码：613 / 615

页数：3

共 17 条

[1] Transverse surface acoustic wave detection by scanning acoustic force microscopy [J].