Quantitative description of phenolic polymer dissolution using the concept of gel layer: II. Base cation size effect

被引:2
作者
Cho, JY [1 ]
Choi, SJ [1 ]
机构
[1] Dong Jin Semichem Co Ltd, Kyonggi Do 445930, South Korea
来源
ADVANCES IN RESIST TECHNOLOGY AND PROCESSING XIX, PTS 1 AND 2 | 2002年 / 4690卷
关键词
phenolic polymer; development mechanism; gel layer; cation size; diffusion;
D O I
10.1117/12.474164
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
The phenolic polymer is assumed to be transferred, via intermediate gel state, from the resin to the developer solution. A mechanism for the development of phenolic polymer is proposed to derive a development rate equation considering gel layer formation. In the previous paper, new model 1,2 using the concept of gel layer made it possible to provide a theoretical interpretation for experimental data of dissolution behavior, for example the dependence of the dissolution rate of phenolic polymer on the aqueous base concentration and molecular weight of resin. Following the previous paper, the dependence of the dissolution rate on the size of the base cation can be explained by taking the diffusion of base through the gel layer into account.
引用
收藏
页码:912 / 920
页数:9
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