Methods to remove distortion artifacts in scanned projections

被引：6

作者：

Kalukin, AR ^{[1
]}

Levine, ZH ^{[1
]}

Tarrio, C ^{[1
]}

Frigo, SP ^{[1
]}

McNulty, I ^{[1
]}

Wang, Y ^{[1
]}

Retsch, CC ^{[1
]}

Kuhn, M ^{[1
]}

Winn, B ^{[1
]}

机构：

[1] Sci Applicat Int Corp, Arlington, VA 22203 USA

来源：

DEVELOPMENTS IN X-RAY TOMOGRAPHY II | 1999年 / 3772卷

关键词：

x-ray imaging; nanotomography; artifact; interconnect; x-ray microscopy; scanning x-ray microscope; image reconstruction; tomography; distortion;

D O I：

10.1117/12.363726

中图分类号：

R318 [生物医学工程];

学科分类号：

0831 ;

摘要：

Artifacts induced by distortions which sometimes occur in two-dimensional projection images can appear in the resulting tomographic reconstructions. We describe a procedure for analyzing, correcting and removing experimental artifacts, and hence reducing reconstruction artifacts. Two-dimensional and three-dimensional images acquired with scanning transmission x-ray microscopy of a sample containing an integrated circuit interconnect show how these procedures can be successfully applied.

引用

页码：237 / 245

页数：9