Bump formation on a glass surface with a transparent coating using femtosecond laser processing

被引：12

作者：

Kawamura, D. ^{[1
]}

Takita, A. ^{[1
]}

Hayasaki, Y. ^{[1
]}

Nishida, N. ^{[1
]}

机构：

[1] Univ Tokushima, Fac Engn, Dept Opt Sci & Technol, Tokushima 7708506, Japan

来源：

APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING | 2006年 / 85卷 / 01期

关键词：

D O I：

10.1007/s00339-006-3648-3

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

The morphology of a glass surface having a transparent coating processed with focused femtosecond laser pulses is investigated. The transparent coating is formed of poly-methyl methacrylate (PMMA). When the glass was coated with a PMMA film with a thickness of 2.8 mu m, bumps were formed over a wide range of axial focus positions. The same laser pulse energy produced cavities when processing bare glass with no coating. The bumps were formed as a result of suppressing material emission from the glass surface by a shielding effect of plasma generated by ablation of the PMMA film and by physical blocking of the PMMA film. A thinner film with a thickness of 0.7 mu m produced a reduced shielding effect, forming an exploded bump with a small pit at its center and debris around the periphery.

引用

页码：39 / 43

页数：5

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