Morphology of femtosecond-laser-ablated borosilicate glass surfaces

被引：116

作者：

Ben-Yakar, A ^{[1
]}

Byer, RL

Harkin, A

Ashmore, J

Stone, HA

Shen, M

Mazur, E

机构：

[1] Stanford Univ, Dept Appl Phys, Ginzton Lab, Stanford, CA 94305 USA

[2] Harvard Univ, Div Engn & Appl Sci, Cambridge, MA 02138 USA

[3] Harvard Univ, Dept Phys, Cambridge, MA 02138 USA

来源：

APPLIED PHYSICS LETTERS | 2003年 / 83卷 / 15期

关键词：

D O I：

10.1063/1.1619560

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

We study the morphology of borosilicate glass surface machined by femtosecond laser pulses. Our observations show that a thin rim is formed around ablated craters after a single laser pulse. When multiple laser pulses are overlapped, the crater rims also overlap and produce a surface roughness. The rim appears to be a resolidified splash from a molten layer generated during the ablation process. We estimate that this molten layer is a few micrometers thick and exists for a few microseconds. During this melt lifetime, forces acting on the molten layer move it from the center to the edge of the crater. (C) 2003 American Institute of Physics.

引用

页码：3030 / 3032

页数：3

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