Nitrogen 1s electron binding energy assignment in carbon nitride thin films with different structures

Carbon nitride thin films deposited by dc unbalanced magnetron sputtering have been analyzed by high-resolution X-ray photoelectron spectroscopy (XPS) and Raman spectroscopy. The XPS data show that N 1s binding stares depend on substrate temperature (T-s). By comparison with the Raman spectra, N is binding states are assigned in which nitrogen atoms are mainly bound to sp(2) and sp(3) carbon atoms at T-s = 100 degrees C, whereas at T-s = 500 degrees C nitrogen atoms are mainly bonded to sp(2), sp(3) and sp(1) carbon atoms. (C) 1997 Elsevier Science B.V.