Investigation of femtosecond laser-assisted micromachining of lithium niobate

被引：14

作者：

Malshe, A ^{[1
]}

Deshpande, D

Stach, E

Rajurkar, K

Alexander, D

机构：

[1] Univ Arkansas, Dept Engn Mech, Fayetteville, AR USA

[2] Lawrence Berkeley Lab, Natl Ctr Electron Microscopy, Berkeley, CA USA

[3] Univ Nebraska, Dept Ind & Management Syst Engn, Lincoln, NE USA

[4] Univ Nebraska, Dept Elect Engn, Lincoln, NE USA

来源：

CIRP ANNALS-MANUFACTURING TECHNOLOGY | 2004年 / 53卷 / 01期

基金：

美国国家科学基金会;

关键词：

laser micro machining; single crystal; surface;

D O I：

10.1016/S0007-8506(07)60675-1

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Lithium Niobate has a potential for applications in electronics and communication industries due to its unique electro-optical, piezoelectric and nonlinear properties. Femtosecond laser machining offers the best alternative to machine the mechanically fragile and optically delicate lithium niobate crystal. This paper reports a study of the effect of femtosecond laser machining on the surface integrity of lithium niobate. The transmission electron microscopy reveals a 100nm thin amorphous region and a void. The chemical analysis shows a loss of lithium and oxygen from the surface and sub-surface. Optical illumination facilitates the selective readout of the written spots of 2 microns size.

引用

页码：187 / 190

页数：4

共 16 条

[1] Femtosecond ultraviolet (248 nm) excimer laser processing of Teflon (PTFE) [J].