Study of a liquid metal field ion emitter for the production of Si ions

被引:7
作者
Aidinis, CJ [1 ]
Bischoff, L
Mair, GLR
Londos, CA
Ganetsos, T
Akhmadaliev, C
机构
[1] Univ Athens, Dept Phys, Sect Appl Phys, GR-15784 Athens, Greece
[2] Rossendorf Inc, Res Ctr, Inst Ion Beam Phys & Mat Res, D-01314 Dresden, Germany
关键词
liquid metal ion sources; silicon ion emission;
D O I
10.1016/j.mee.2004.02.026
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
The study of AuSi liquid metal alloy ion sources (LMAIs) for the production of Si ions is not new. However, the present work encompasses in a concise form almost all fundamental aspects of source behaviour, in particular of a Au82Si18 source. A key finding, manifested in the behaviour of the ion extraction voltage with temperature, is the abnormal behaviour of the surface tension coefficient of the alloy with temperature. An important deduction, however, concerns the mechanisms responsible for the creation of doubly charged ions: reasons of self-consistency suggest that while Si++ is directly field-evaporated, Au++ must form by the post-ionization of Au+. (C) 2004 Elsevier B.V. All rights reserved.
引用
收藏
页码:116 / 119
页数:4
相关论文
共 14 条
[1]   Temperature dependence of the electric characteristics of liquid metal alloy ion sources [J].
Bischoff, L ;
Teichert, J ;
Ganetsos, T ;
Mair, GLR .
JOURNAL OF PHYSICS D-APPLIED PHYSICS, 2000, 33 (06) :692-695
[2]  
Brandon D. G., 1964, SURF SCI, V3, P1
[3]  
CROXTON CA, 1980, STAT MECH LIQUID SUR, P161
[4]   GENERALIZED THEORY OF STANDARD FIELD-ION APPEARANCE ENERGIES [J].
FORBES, RG .
SURFACE SCIENCE, 1976, 61 (01) :221-240
[5]   FAVORABLE SOURCE MATERIAL IN LIQUID-METAL-ION SOURCES FOR FOCUSED BEAM APPLICATIONS [J].
ISHITANI, T ;
UMEMURA, K ;
KAWANAMI, Y .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1988, 6 (03) :931-935
[6]   CHARGE STATE OF IONS IN LIQUID-METAL FIELD-ION SOURCES [J].
KINGHAM, DR .
APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING, 1983, 31 (03) :161-164
[8]   EMISSION FROM LIQUID-METAL ION SOURCES [J].
MAIR, GLR .
NUCLEAR INSTRUMENTS & METHODS, 1980, 172 (03) :567-576
[9]   An in-depth investigation of the energy distribution of doubly charged ions emitted from a liquid metal alloy ion source [J].
Mair, GLR ;
Bischoff, L ;
Mair, AWR ;
Aidinis, CJ ;
Ganetsos, T ;
Aleiev, CA .
JOURNAL OF PHYSICS D-APPLIED PHYSICS, 2002, 35 (09) :L33-L36
[10]  
PREWETT PD, 1991, FOCUSED ION BEAMS LI