Effect of damage production rate in aluminium surface treatment using an ECR-PBII apparatus

被引：3

作者：

Bolduc, M ^{[1
]}

Popovici, D ^{[1
]}

Stansfield, BL ^{[1
]}

Terreault, B ^{[1
]}

机构：

[1] Univ Quebec, INRS Energie & Mat, Varennes, PQ J3X 1S2, Canada

来源：

SURFACE & COATINGS TECHNOLOGY | 2002年 / 156卷 / 1-3期

基金：

加拿大自然科学与工程研究理事会;

关键词：

photoelectron spectroscopy; plasma source ion implantation; radiation-enhanced diffusion; aluminium;

D O I：

10.1016/S0257-8972(02)00122-6

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

The damage production rate is an important factor in the diffusion of different species during implantation, for instance O-ion PBII of Al and its alloys. In this experiment, we try to distinguish the effect of purely radiation-enhanced diffusion (RED) from the synergistic effect between RED and Mg segregation driven by oxidation observed in earlier work with Mg-containing Al alloys. We investigated the influence of the irradiation damage on pure Al for which no segregation effect can occur. We used different gas compositions [O-2, Ar, Ar(10%O-2) and Ne(10%O-2)] to provide Simultaneous species implantation and a variable ratio of damage to active ion implantation rate. The effect of the damage rate on the 0 implanted profiles was, measured by XPS. Following implantation with an Ar(10%O-2) plasma, a very significant inward displacement of the peak concentration was observed. Analysis of the profiles leads to the conclusion that a purely RED effect is involved in this O migration. (C) 2002 Elsevier Science B.V. All rights reserved.

引用

页码：162 / 165

页数：4

共 12 条

[1]

BIERSACK JP, SRIM2000

[2] Giant segregation effect and surface mechanical modification of aluminum alloys by oxygen plasma source ion implantation [J].