Rectangular nanovoids in helium-implanted and thermally annealed MgO(100)

被引：36

作者：

Kooi, BJ

van Veen, A

De Hosson, JTM

Schut, H

Fedorov, AV

Labohm, F

机构：

[1] Univ Groningen, Ctr Mat Sci, Dept Appl Phys, NL-4797 AG Groningen, Netherlands

[2] Univ Groningen, Netherlands Inst Met Res, NL-4797 AG Groningen, Netherlands

[3] Delft Univ Technol, Inst Interfac Reactor, NL-2629 JB Delft, Netherlands

来源：

APPLIED PHYSICS LETTERS | 2000年 / 76卷 / 09期

关键词：

D O I：

10.1063/1.125954

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

Cleaved MgO(100) single crystals were implanted with 30 keV He-3 ions with doses varying from 1 x 10(19) to 1 x 10(20) m(-2) and subsequently thermally annealed from 100 to 1100 degrees C. Transmission electron microscopy observations revealed the existence of sharply rectangular nanosize voids at a depth slightly shallower than the helium-implantation range. Monitoring of the defect depth profile and the retained amount of helium was performed by positron-beam analysis and neutron depth profiling, respectively. (C) 2000 American Institute of Physics. [S0003-6951(00)01709-5].

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页码：1110 / 1112

页数：3

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