HELIUM DESORPTION PERMEATION FROM BUBBLES IN SILICON - A NOVEL METHOD OF VOID PRODUCTION

被引：234

作者：

GRIFFIOEN, CC ^{[1
]}

EVANS, JH ^{[1
]}

DEJONG, PC ^{[1
]}

VANVEEN, A ^{[1
]}

机构：

[1] DELFT UNIV TECHNOL,DELFT,NETHERLANDS

来源：

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS | 1987年 / 27卷 / 03期

关键词：

D O I：

10.1016/0168-583X(87)90522-2

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

引用

页码：417 / 420

页数：4

共 9 条

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