STRUCTURAL STUDIES OF HYDROGEN-BOMBARDED SILICON USING ELLIPSOMETRY AND TRANSMISSION ELECTRON-MICROSCOPY

被引：46

作者：

COLLINS, RW ^{[1
]}

YACOBI, BG ^{[1
]}

JONES, KM ^{[1
]}

TSUO, YS ^{[1
]}

机构：

[1] SOLAR ENERGY RES INST,GOLDEN,CO 80401

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1986年 / 4卷 / 02期

关键词：

D O I：

10.1116/1.573463

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

引用

页码：153 / 158

页数：6

共 19 条

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[2] AN INVESTIGATION OF ION-BOMBARDED AND ANNEALED (111) SURFACES OF GE BY SPECTROSCOPIC ELLIPSOMETRY
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[3] DIELECTRIC-PROPERTIES OF HEAVILY DOPED CRYSTALLINE AND AMORPHOUS-SILICON FROM 1.5 TO 6.0 EV
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[J]. PHYSICAL REVIEW B, 1984, 29 (02): : 768 - 779
[4] DIELECTRIC FUNCTIONS AND OPTICAL-PARAMETERS OF SI, GE, GAP, GAAS, GASB, INP, INAS, AND INSB FROM 1.5 TO 6.0 EV
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STUDNA, AA
[J]. PHYSICAL REVIEW B, 1983, 27 (02) : 985 - 1009
[5] METHODS FOR DRIFT STABILIZATION AND PHOTOMULTIPLIER LINEARIZATION FOR PHOTOMETRIC ELLIPSOMETERS AND POLARIMETERS
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[J]. REVIEW OF SCIENTIFIC INSTRUMENTS, 1978, 49 (03) : 291 - 297
[6] ASPNES DE, 1981, SPIE P, V276, P188
[7] ASPNES DE, 1975, J OPT SOC AM, V64, P812
[8] OPTICAL-PROPERTIES OF LOW-PRESSURE CHEMICALLY VAPOR-DEPOSITED SILICON OVER THE ENERGY-RANGE 3.0-EV-6.0-EV
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MOGAB, CJ
[J]. APPLIED PHYSICS LETTERS, 1981, 38 (01) : 56 - 58
[9] THE PREPARATION OF CROSS-SECTION SPECIMENS FOR TRANSMISSION ELECTRON-MICROSCOPY
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SINCLAIR, R
[J]. JOURNAL OF ELECTRON MICROSCOPY TECHNIQUE, 1984, 1 (01): : 53 - 61
[10] OPTICAL-PROPERTIES OF DENSE THIN-FILM SI AND GE PREPARED BY ION-BEAM SPUTTERING
COLLINS, RW
WINDISCHMANN, H
CAVESE, JM
GONZALEZHERNANDEZ, J
[J]. JOURNAL OF APPLIED PHYSICS, 1985, 58 (02) : 954 - 957

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