OPTICAL-PROPERTIES OF DENSE THIN-FILM SI AND GE PREPARED BY ION-BEAM SPUTTERING

被引：25

作者：

COLLINS, RW ^{[1
]}

WINDISCHMANN, H ^{[1
]}

CAVESE, JM ^{[1
]}

GONZALEZHERNANDEZ, J ^{[1
]}

机构：

[1] ENERGY CONVERS DEVICES INC,TROY,MI 48084

来源：

JOURNAL OF APPLIED PHYSICS | 1985年 / 58卷 / 02期

关键词：

D O I：

10.1063/1.336172

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：954 / 957

页数：4

共 10 条

[1] Aspnes D. E., 1981, Proceedings of the Society of Photo-Optical Instrumentation Engineers, V276, P188
[2] DIELECTRIC-PROPERTIES OF HEAVILY DOPED CRYSTALLINE AND AMORPHOUS-SILICON FROM 1.5 TO 6.0 EV
ASPNES, DE
STUDNA, AA
KINSBRON, E
[J]. PHYSICAL REVIEW B, 1984, 29 (02): : 768 - 779
[3] DIELECTRIC FUNCTIONS AND OPTICAL-PARAMETERS OF SI, GE, GAP, GAAS, GASB, INP, INAS, AND INSB FROM 1.5 TO 6.0 EV
ASPNES, DE
STUDNA, AA
[J]. PHYSICAL REVIEW B, 1983, 27 (02) : 985 - 1009
[4] ASPNES DE, 1975, J OPT SOC AM, V64, P812
[5] OPTICAL-PROPERTIES OF LOW-PRESSURE CHEMICALLY VAPOR-DEPOSITED SILICON OVER THE ENERGY-RANGE 3.0-EV-6.0-EV
BAGLEY, BG
ASPNES, DE
ADAMS, AC
MOGAB, CJ
[J]. APPLIED PHYSICS LETTERS, 1981, 38 (01) : 56 - 58
[6] AN ELLIPSOMETRY STUDY OF A HYDROGENATED AMORPHOUS-SILICON BASED N-I STRUCTURE
COLLINS, RW
CLARK, AH
GUHA, S
HUANG, CY
[J]. JOURNAL OF APPLIED PHYSICS, 1985, 57 (10) : 4566 - 4571
[7] STRUCTURAL AND OPTICAL-PROPERTIES OF AMORPHOUS-GERMANIUM - AMORPHOUS-GERMANIUM .3. OPTICAL-PROPERTIES
CONNELL, GAN
TEMKIN, RJ
PAUL, W
[J]. ADVANCES IN PHYSICS, 1973, 22 (05) : 643 - 665
[8] STRUCTURE AND STABILITY OF LOW-PRESSURE CHEMICALLY VAPOR-DEPOSITED SILICON FILMS
KAMINS, TI
MANDURAH, MM
SARASWAT, KC
[J]. JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1978, 125 (06) : 927 - 932
[9] ERRORS IN EFFECTS OF COMPONENT OPTICAL-ACTIVITY IN DATA REDUCTION AND CALIBRATION OF ROTATING-ANALYZER ELLIPSOMETERS
RADMAN, DM
CAHAN, BD
[J]. JOURNAL OF THE OPTICAL SOCIETY OF AMERICA, 1981, 71 (12) : 1546 - 1546
[10] CRITICAL VOLUME FRACTION OF CRYSTALLINITY FOR CONDUCTIVITY PERCOLATION IN PHOSPHORUS-DOPED SI-F-H ALLOYS
TSU, R
GONZALEZHERNANDEZ, J
CHAO, SS
LEE, SC
TANAKA, K
[J]. APPLIED PHYSICS LETTERS, 1982, 40 (06) : 534 - 535

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