Mode transition induced by low-frequency current in dual-frequency capacitive discharges

被引：123

作者：

Kim, HC ^{[1
]}

Lee, JK ^{[1
]}

机构：

[1] Pohang Univ Sci & Technol, Dept Elect & Elect Engn, Pohang 790784, South Korea

来源：

PHYSICAL REVIEW LETTERS | 2004年 / 93卷 / 08期

关键词：

D O I：

10.1103/PhysRevLett.93.085003

中图分类号：

O4 [物理学];

学科分类号：

0702 ;

摘要：

The mode transition induced by varying the low-frequency current in low-pressure dual-frequency discharges in argon is found through particle-in-cell or Monte Carlo simulations. As the low-frequency (2 MHz) current increases for the fixed high-frequency (27 MHz) current, the electron distribution function (EDF) changes from Druyvesteyn to bi-Maxwellian (in alpha mode) or Maxwellian-type (in gamma mode), along with the significant drop in the effective electron temperature. It is shown that this EDF evolution is attributed to the transition from collisional to collisionless property (but not stochastic heating) of the low-energy electrons as well as the alpha-gamma transition.

引用

页码：085003 / 1

页数：4

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