Effective electron collision frequency and electrical conductivity of radio frequency plasmas

被引：39

作者：

Godyak, VA ^{[1
]}

Piejak, RB ^{[1
]}

Alexandrovich, BM ^{[1
]}

机构：

[1] OSRAM SYLVANIA Dev Inc, Beverly, MA 01915 USA

来源：

JOURNAL OF APPLIED PHYSICS | 1999年 / 85卷 / 06期

关键词：

D O I：

10.1063/1.369646

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

The electron transport collision frequency in a radio frequency (rf) field nu(en) and the effective rf field frequency omega(eff) have been found as appropriate integrals of the electron energy distribution function measured in an argon inductively coupled plasma (ICP) at 6.78 MHz. Also, the effective electron collision frequency nu(eff) and omega(eff) have been found from the plasma conductivity measured with a magnetic probe. It is shown that due to the Ramsauer effect and collisionless power absorption in the ICP, nu(eff) and nu(eff)/omega(eff) vary unexpectedly slowly with gas pressure. (C) 1999 American Institute of Physics. [S0021-8979(99)06806-1].

引用

页码：3081 / 3083

页数：3

共 11 条

[1] Experimental setup and electrical characteristics of an inductively coupled plasma [J].