Microscale temperature measurement by scanning thermal microscopy

Scanning thermal microscopy (SThM) can measure thermal image with a nano-scale spatial resolution. However, there remains an issue in quantitative temperature measurement. We proposed an active temperature measurement method that provides a real temperature image by compensating a variation in contact thermal conductance. Performance of the active method was examined by a multi-function cantilever made with micro-fabrication process. Response test of the cantilever showed about 50 Hz cut off frequency for both passive and active method. Temperature measurement test indicated that sensitivity of heat flow detection was not enough to measure real temperature regardless of the thermal contact conductance. Imaging test demonstrated that the active method takes temperature image closer to real temperature distribution than the passive method.