SCANNING NEAR-FIELD OPTICAL MICROSCOPY AND SCANNING THERMAL MICROSCOPY

被引:111
作者
PYLKKI, RJ
MOYER, PJ
WEST, PE
机构
[1] TopoMetrix Corp, Santa Clara, CA, 95054-1162
来源
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS | 1994年 / 33卷 / 6B期
关键词
SCANNING NEAR-FIELD OPTICAL MICROSCOPY; SCANNING THERMAL MICROSCOPY; SCANNING TUNNELING MICROSCOPY AND ATOMIC FORCE MICROSCOPY;
D O I
10.1143/JJAP.33.3785
中图分类号
O59 [应用物理学];
学科分类号
摘要
The development of the scanning tunneling microscopy has led to the development of related techniques which include the scanning near-field microscopy (SNOM) and the scanning thermal microscopy (SThM). These techniques provide sample information in addition to the simultaneously obtained topography. With SNOM normal optical microscopy contrast mechanisms (adsorbance, fluorescence, polarization, etc.) can be used. The principles and design of a SNOM are presented. Subwavelength resolution (better than lambda/20) is demonstrated. In SThM, the contrast is provided by temperature and thermal conductivity. The design of a resistive thermal probe is described. Several operating modes are described and image contrast due to thermal conductivity is demonstrated.
引用
收藏
页码:3785 / 3790
页数:6
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