Single-electron transistors based on Al/AlOx/Al and Nb/AlOx/Nb tunnel junctions

被引:9
作者
Bluthner, K [1 ]
Gotz, M [1 ]
Hadicke, A [1 ]
Krech, W [1 ]
Wagner, T [1 ]
Muhlig, H [1 ]
Fuchs, HJ [1 ]
Hubner, U [1 ]
Schelle, D [1 ]
Kley, EB [1 ]
Fritzsch, L [1 ]
机构
[1] INST PHYS HOCHTECHNOL EV,D-07743 JENA,GERMANY
关键词
D O I
10.1109/77.621988
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
As an alternative to the shadow evaporation method for the preparation of ultrasmall tunnel junctions we have established the so-called self-aligned in-line technique. It was applied to the fabrication of common Al/AlOx/Al-type and, for the first time, Nb/AlOx/Nb-based single-electron transistors. The characterization of the samples at temperatures in the range of a few hundred millikelvins reveals charging effects (Coulomb blockade and gate modulation) of the quasiparticle current.
引用
收藏
页码:3099 / 3102
页数:4
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