A microstructural study of the CdTe/ZnTe film morphology as related to the Si substrate orientation

被引:6
作者
Sarney, WL [1 ]
Brill, G [1 ]
机构
[1] USA, Res Lab, Sensors & Electron Devices Directorate, AMSRD,ARL,SE,EI, Adelphi, MD 20783 USA
关键词
CdTe; Si; transmission electron microscopy (TEM); molecular beam epitaxy (MBE);
D O I
10.1016/j.sse.2004.05.036
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
A series of CdTe/ZnTe films was grown by molecular beam epitaxy (MBE) onto Si substrates. We examine the relationships between the film morphology, the ZnTe growth method, and the Si growth orientation. The substrates' degree of miscut from the [1 1 1] direction ranged from 0degrees to 29.5degrees. Transmission electron microscopy (TEM) and X-ray diffraction (XRD) studies show that the substrate orientation is maintained by the ZnTe/CdTe epilayers only for low miscut angles. For higher miscut angles, the film orientation does not match that of the substrate, and in some cases is dependent on the growth methods used to deposit the ZnTe buffer layer. Published by Elsevier Ltd.
引用
收藏
页码:1917 / 1920
页数:4
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