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Novel photoimaging system based on photoinduced electron transfer in polymers containing pendant benzophenone-borate salts

被引：14
作者：
Mejiritski, A
Polykarpov, AY
Sarker, AM
Neckers, DC
机构：
[1] Center for Photochemical Sciences, Bowling Green State University, Bowling Green
来源：
CHEMISTRY OF MATERIALS | 1996年 / 8卷 / 07期
关键词：
D O I：
10.1021/cm960103+
中图分类号：
O64 [物理化学（理论化学）、化学物理学];
学科分类号：
070304 ; 081704 ;
摘要：
A new positive-tone photoimaging system developed by aqueous acid and based on photogeneration of polymeric amine via photoinduced electron transfer in polymers bearing pendant benzophenone-borate salts is reported. Though the current polymer has insufficient sensitivity to be used as a photoresist in current microlithography industry, the resolution attained and the stability of the original polymer in aqueous bases makes the system of potential interest for other future applications.
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页码：1360 / &
页数：4
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