Preparation of cantilevered W tips for atomic force microscopy and apertureless near-field scanning optical microscopy

被引：22

作者：

Sun, WX ^{[1
]}

Shen, ZX ^{[1
]}

Cheong, FC ^{[1
]}

Yu, GY ^{[1
]}

Lim, KY ^{[1
]}

Lin, JY ^{[1
]}

机构：

[1] Natl Univ Singapore, Fac Sci, Dept Phys, Singapore 117542, Singapore

来源：

REVIEW OF SCIENTIFIC INSTRUMENTS | 2002年 / 73卷 / 08期

关键词：

D O I：

10.1063/1.1494867

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

Tip characteristics play an important role in the resolution and sensitivity of scanning probe microscopy. Extensive efforts have been devoted to tip fabrication. Most of the research is focused on scanning tunneling microscopy applications, which require sharp and short tips. Long tips that can be bent into cantilevered tips have great potential in atomic force microscopy/apertureless near-field scanning optical microscopy applications. However, the fabrication of such tips has been rarely reported. The present work is carried out with the aim of optimizing the conditions suitable for fabricating long and sharp tungsten tips. Besides topography, optical, and spectroscopic information, electrical and magnetic measurements can also be carried out with such tips obtained with the recipe reported in this article. The long tips also make it possible to measure deep grooves/trenches. (C) 2002 American Institute of Physics.

引用

页码：2942 / 2947

页数：6

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