Reduction of droplet volume by controlling actuating waveforms in inkjet printing for micro-pattern formation

被引:129
作者
Gan, H. Y. [1 ]
Shan, Xuechuan [1 ]
Eriksson, T. [2 ,3 ]
Lok, B. K. [1 ]
Lam, Y. C. [2 ]
机构
[1] SIMTech, Singapore 638075, Singapore
[2] Nanyang Technol Univ, Singapore 639798, Singapore
[3] Uppsala Univ, Dept Engn Sci, Uppsala, Sweden
关键词
POLYMERS;
D O I
10.1088/0960-1317/19/5/055010
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
080906 [电磁信息功能材料与结构]; 082806 [农业信息与电气工程];
摘要
Inkjet printing has proven to be a promising and flexible process methodology for low cost and drop-on-demand pattern formation in small-scale production of micro-electro-mechanical systems. To optimize the micro-patterns formed by inkjet printing, an accurate control of droplet volume is essential and critical. In this study, an inkjet system with a nozzle driven by a circular piezoelectric element was used to explore the impact of different waveforms on droplet volume. The investigation into this study included the impact of unipolar, bipolar, M-shaped and W-shaped waveforms as well as the effects of their amplitudes and pulse durations. The inkjetting behavior of Newtonian and non-Newtonian fluids under different actuating waveforms was studied in order to obtain a maximum reduction in ejected droplet sizes. An effective reduction of droplet volume in the range of 50-80% was demonstrated. The results of inkjetting PEDOT ink on a polished silicon surface showed that a 50% reduction in line width was achieved.
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页数:8
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