Prospects of bipolar diamond devices

被引:19
作者
Aleksov, A [1 ]
Denisenko, A [1 ]
Kohn, E [1 ]
机构
[1] Univ Ulm, Dept Elect Devices & Circuits, D-89081 Ulm, Germany
关键词
Boron - Electric current measurement - Electron energy levels - Epitaxial growth - Ionization - Leakage currents - Nitrogen - Semiconducting diamonds - Semiconductor device manufacture - Semiconductor doping - Semiconductor junctions - Substrates;
D O I
10.1016/S0038-1101(99)00244-0
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
The prospects of diamond bipolar devices are analysed theoretically and experimentally in respect to the problem of deep doping, especially the deep donor in diamond. For this purpose a set of p-n-p bipolar junction transistors (BJTs) is fabricated on p-type diamond substrates by epitaxial growth using boron (E-A=0.4 eV) and nitrogen (E-D=1.7 eV) as the p- and n-type dopants respectively. It is shown that at the boron/nitrogen junction a p-n junction is formed. The built-in potential of the junction is determined by the ionised boron/nitrogen impurities. The specific features of the fabricated devices are the high resistivity of the nitrogen doped base (10 G Omega.cm at 20 degrees C) and a significant leakage current of the reverse biased p-n junctions. These factors limit the transistor action to d.c.-operation in the nA-current range and to temperatures below 200 degrees C where leakage starts to dominate. The values of the static current gain I-C/I-B are measured in the common base mode 200 and in the common emitter mode 1.1. The theoretical section of the paper deals with the calculation of the static current gain of diamond pnp transistor structures in dependence of the donor energy level, temperature and frequency. Both the theoretical and the experimental results indicate that diamond bipolar transistors with a nitrogen doped n-type base can exhibit a current gain beta of up to 30,000 in the d.c.-regime provided the leakage of the p-n junctions is sufficiently low. High-gain diamond transistors operating in GHz-frequency can be expected as soon as n-doping by shallow donor like phosphorous (E-D < 0.5 eV) becomes available. (C) 2000 Elsevier Science Ltd. All rights reserved.
引用
收藏
页码:369 / 375
页数:7
相关论文
共 13 条
[1]   Boron-doped homoepitaxial diamond layers: Fabrication, characterization, and electronic applications [J].
Borst, TH ;
Weis, O .
PHYSICA STATUS SOLIDI A-APPLICATIONS AND MATERIALS SCIENCE, 1996, 154 (01) :423-444
[2]  
Davies G., 1994, PROPERTIES GROWTH DI, P437
[3]  
DRESSELHAUS M, 1992, ION IMPLANTATION DIA, P180
[4]  
GLUCHE P, 1998, P 56 DEV RES C 22 24, P56
[5]   Hydrogen-terminated diamond surfaces and interfaces [J].
Kawarada, H .
SURFACE SCIENCE REPORTS, 1996, 26 (07) :205-259
[6]  
KUNZE M, 1998, P E MRS 1998 SPR M
[7]   DEVICE PROPERTIES OF HOMOEPITAXIALLY GROWN DIAMOND [J].
LANDSTRASS, MI ;
PLANO, MA ;
MORENO, MA ;
MCWILLIAMS, S ;
PAN, LS ;
KANIA, DR ;
HAN, S .
DIAMOND AND RELATED MATERIALS, 1993, 2 (5-7) :1033-1037
[8]   N-type high-conductive epitaxial diamond film prepared by gas source molecular beam epitaxy with methane and tri-n-butylphosphine [J].
Nishimori, T ;
Nakano, K ;
Sakamoto, H ;
Takakuwa, Y ;
Kono, S .
APPLIED PHYSICS LETTERS, 1997, 71 (07) :945-947
[9]  
Pan L. S., 1995, DIAMOND ELECT PROPER, P472
[10]  
PANKOVE J, 94389156 IEDM