Effects of deflection on bulge test measurements of enhanced modulus in multilayered films

被引:11
作者
Jankowski, AF [1 ]
Tsakalakos, T [1 ]
机构
[1] RUTGERS STATE UNIV, COLL ENGN, PISCATAWAY, NJ 08855 USA
关键词
bulge deflection; metallic multilayers; biaxial moduli; linear elasticity;
D O I
10.1016/S0040-6090(96)09031-1
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
The bulge test is an experimental method to determine the yield behavior and biaxial elastic modulus of thin films. In a typical bulge test, pressure is applied to a free-standing foil. The bulge height h is measured as function of the applied pressure. The initial height h(0) of the bulge deflection must be considered when analyzing interferometric bulge-height measurements as the range of linearly elastic behavior and the magnitude of biaxial modulus enhancement are directly affected by it. Computation of the biaxial modulus over a linearly elastic range to 0.10% strain is shown to yield rule-of-mixtures values for homogeneous Ag/Pd and Cu/Pd multilayer foils. An apparent 500% modulus enhancement for a 1.47 nm Cu/Pd foil is reduced to 12% using an h(0) correction to produce a linear elastic response to 0.10% offset strain. For a 100% enhancement found in a 2.24 nm Ag/Pd foil, the ho correction reduces the enhancement to 51%. Analysis of bulge test results using an ho correction shows that modulus enhancement exists in metallic multilayers, but not to the extent found using a non-linear elastic analysis.
引用
收藏
页码:243 / 247
页数:5
相关论文
共 10 条
[1]  
Beams J. W., 1959, The Structure and Properties of Thin Films, P183
[2]  
Dieter G. E., 1976, MECH METALLURGY, P329
[3]   THE MECHANICAL-PROPERTIES OF THIN-FILMS - A REVIEW [J].
HARDWICK, DA .
THIN SOLID FILMS, 1987, 154 (1-2) :109-124
[4]   ELASTIC-MODULUS IN COMPOSITION-MODULATED SILVER-PALLADIUM AND COPPER-GOLD FOILS [J].
HENEIN, GE ;
HILLIARD, JE .
JOURNAL OF APPLIED PHYSICS, 1983, 54 (02) :728-733
[5]   ELASTIC PROPERTY DEPENDENCE ON LAYER PERIODICITY IN CU/NI SUPERLATTICES [J].
JANKOWSKI, AF ;
SEDILLO, EM ;
HAYES, JP .
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1994, 33 (9A) :5019-5025
[6]   ANALYSIS OF THE ACCURACY OF THE BULGE TEST IN DETERMINING THE MECHANICAL-PROPERTIES OF THIN-FILMS [J].
SMALL, MK ;
NIX, WD .
JOURNAL OF MATERIALS RESEARCH, 1992, 7 (06) :1553-1563
[7]   THE ELASTIC BIAXIAL MODULUS OF AG-PD MULTILAYERED THIN-FILMS MEASURED USING THE BULGE TEST [J].
SMALL, MK ;
DANIELS, BJ ;
CLEMENS, BM ;
NIX, WD .
JOURNAL OF MATERIALS RESEARCH, 1994, 9 (01) :25-30
[8]   ELASTIC-MODULUS IN COMPOSITION-MODULATED COPPER-NICKEL FOILS [J].
TSAKALAKOS, T ;
HILLIARD, JE .
JOURNAL OF APPLIED PHYSICS, 1983, 54 (02) :734-737
[9]   THE BULGE TEST - A COMPARISON OF THEORY AND EXPERIMENT FOR ISOTROPIC AND ANISOTROPIC FILMS [J].
TSAKALAKOS, T .
THIN SOLID FILMS, 1981, 75 (03) :293-305
[10]   ENHANCED ELASTIC-MODULUS IN COMPOSITION-MODULATED GOLD-NICKEL AND COPPER-PALLADIUM FOILS [J].
YANG, WMC ;
TSAKALAKOS, T ;
HILLIARD, JE .
JOURNAL OF APPLIED PHYSICS, 1977, 48 (03) :876-879