Electrostatic microshutters-micromirrors array for light modulation systems.

被引：3

作者：

Pizzi, M ^{[1
]}

Koniachkine, V ^{[1
]}

Bassino, E ^{[1
]}

Sinesi, S ^{[1
]}

Perlo, P ^{[1
]}

机构：

[1] Ctr Ric Fiat, Orbassano, TO, Italy

来源：

MINIATURIZED SYSTEMS WITH MICRO-OPTICS AND MEMS | 1999年 / 3878卷

关键词：

microshutter; micromirror; electrostatic; microactuators array;

D O I：

10.1117/12.361258

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

A light modulation system based on microactuators array is reported. Electrostatically driven microstructures can close or open parts of a transparent substrate (glass in the visible range) modulating the incident light. The surface of the microstructures can be used as shutter or as mirror or simultaneously in both functions. Each microactuator of the array is made by three main parts: a rigid electrode coated on the substrate, a dielectric layer and a flexible electrode (cantilever). The flexible electrode is fixed at one end on the dielectric: elastic forces keep the cantilever suspended. The substrate and the rigid electrode are transparent. Applying an appropriate voltage between the electrodes, the flexible one changes its position, rolling on the surface of the dielectric. The previous transparent area becomes reflective. Photolitography and thin film technologies have been used to build microshutter-micromirror arrays. Preliminary electrical and optical tests are presented in this paper.

引用

页码：164 / 171

页数：8

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