Defect diagnostics using scanning photoluminescence in multicrystalline silicon

被引:15
作者
Tarasov, I
Ostapenko, S
Feifer, V
McHugo, S
Koveshnikov, SV
Weber, J
Haessler, C
Reisner, EU
机构
[1] Univ S Florida, Ctr Microelect Res, Tampa, FL 33620 USA
[2] Univ Calif Berkeley, Lawrence Berkeley Lab, Adv Light Source Ctr, Berkeley, CA 94720 USA
[3] SEH Amer Inc, Vancouver, WA 98682 USA
[4] Max Planck Inst Festkorperforsch, D-70569 Stuttgart, Germany
[5] Bayer AG, D-47829 Krefeld, Germany
基金
美国国家科学基金会;
关键词
silicon; photoluminescence; dislocation; defects;
D O I
10.1016/S0921-4526(99)00570-0
中图分类号
O469 [凝聚态物理学];
学科分类号
070205 ;
摘要
Scanning room-temperature photoluminescence (PL) spectroscopy was applied to multicrystalline silicon (mc-Si) wafers to assess electronic properties of the high-quality solar grade material. The intensity of band-to-band emission with the maximum at 1.09 eV measured across entire me-Si wafer positively correlates with minority carrier lifetime measured concurrently using laser-microwave reflection technique. We have found in me-Si wafers an intense "defect" PL band with the maximum at about 0.8 eV and half-width of similar to 75 meV at room temperature. It is strongly localized in "bad" areas possessing a reduced by a factor of two orders band-to-band PL intensity and a noticeable degraded lifetime. High-resolution PL mapping of the 0.8 eV band revealed a link to areas with high dislocation density. PL spectra down to 4.2 K were measured in regions with high and low "defect" band intensity demonstrating a correlation of the 0.8 eV band with distribution of the D3/D4 dislocation lines, The origin of the 0.8 eV band is discussed in a connection with dislocation network. (C) 1999 Elsevier Science B.V. All rights reserved.
引用
收藏
页码:549 / 552
页数:4
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