ZnO:Al thin film gas sensor for detection of ethanol vapor

被引：118

作者：

Chou, Shih Min

Teoh, Lay Gaik

Lai, Wei Hao

Su, Yen Hsun

Hon, Min Hsiung

机构：

[1] Natl Pingtung Univ Sci & Technol, Dept Mech Engn, Neipu 91201, Pingtung, Taiwan

[2] Natl Cheng Kung Univ, Dept Mat Sci & Engn, Tainan 70101, Taiwan

来源：

SENSORS | 2006年 / 6卷 / 10期

关键词：

ZnO : Al; sputtering; ethanol gas sensor; thin films;

D O I：

10.3390/s6101420

中图分类号：

O65 [分析化学];

学科分类号：

070302 ; 081704 ;

摘要：

The ZnO: Al thin films were prepared by RF magnetron sputtering on Si substrate using Pt as interdigitated electrodes. The structure was characterized by XRD and SEM analyses, and the ethanol vapor gas sensing as well as electrical properties have been investigated and discussed. The gas sensing results show that the sensitivity for detecting 400 ppm ethanol vapor was similar to 20 at an operating temperature of 250 degrees C. The high sensitivity, fast recovery, and reliability suggest that ZnO: Al thin film prepared by RF magnetron sputtering can be used for ethanol vapor gas sensing.

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页码：1420 / 1427

页数：8

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