Novel capacitive sensor: Fabrication from carbon nanotube arrays and sensing property characterization

被引：41

作者：

Chen, Yan ^{[1
,2
]}

Meng, Fanli ^{[1
,2
]}

Li, Minqiang ^{[1
]}

Liu, Jinhuai ^{[1
]}

机构：

[1] Chinese Acad Sci, Inst Intelligent Machines, Key Lab Biomimet Sensing & Adv Robot Technol, Hefei 230031, Peoples R China

[2] Univ Sci & Technol China, Dept Chem, Hefei 230026, Peoples R China

来源：

SENSORS AND ACTUATORS B-CHEMICAL | 2009年 / 140卷 / 02期

基金：

国家高技术研究发展计划(863计划); 中国国家自然科学基金;

关键词：

Anodic aluminum oxide template; Capacitive sensor; Physisorption; Carbon nanotube arrays; CHEMICAL-DETECTION; GAS; GROWTH; ADSORPTION; TEMPLATE;

D O I：

10.1016/j.snb.2009.04.012

中图分类号：

O65 [分析化学];

学科分类号：

070302 ; 081704 ;

摘要：

A sandwich-structured gas sensor based on vertically aligned carbon nanotube (CNT) arrays was fabricated and investigated for ammonia and formic acid sensing. Vertically aligned CNT arrays were synthesized by acetone pyrolysis in anodized aluminum oxide (AAO) templates without the use of catalysts. The capacitance change of the sensor with target gas exposure was used as the sensing parameter. The sensor had relatively short response and recovery time. It was completely recovered within 6 min, without requiring any external stimuli. The possible mechanism of the responses was also discussed. (C) 2009 Elsevier B.V. All rights reserved.

引用

页码：396 / 401

页数：6

共 33 条

[1]

BRUNAUER S, 1940, J AM CHEM SOC, V62

[2] Adsorption of NH3 and NO2 molecules on carbon nanotubes [J].

Chang, H ;

Lee, JD ;

Lee, SM ;

Lee, YH .

APPLIED PHYSICS LETTERS, 2001, 79 (23) :3863-3865

[3] Molecular photodesorption from single-walled carbon nanotubes [J].

Chen, RJ ;

Franklin, NR ;

Kong, J ;

Cao, J ;

Tombler, TW ;

Zhang, YG ;

Dai, HJ .

APPLIED PHYSICS LETTERS, 2001, 79 (14) :2258-2260

[4] Preparation of well-aligned CNT arrays catalyzed with porous anodic aluminum oxide template [J].

Chen, X ;

Huang, XJ ;

Huang, JR ;

Huang, ZY ;

Xu, WH ;

Liu, JH .

CHINESE JOURNAL OF CHEMICAL PHYSICS, 2006, 19 (01) :79-83

[5] Patterned multiwall carbon nanotube films as materials of NO2 gas sensors [J].

Cho, Woo-Sung ;

Moon, Seung-Il ;

Paek, Kyeong-Kap ;

Lee, Yun-Hi ;

Park, Jung-Ho ;

Ju, Byeong-Kwon .

SENSORS AND ACTUATORS B-CHEMICAL, 2006, 119 (01) :180-185

[6] Selective gas detection using a carbon nanotube sensor [J].

Chopra, S ;

McGuire, K ;

Gothard, N ;

Rao, AM ;

Pham, A .

APPLIED PHYSICS LETTERS, 2003, 83 (11) :2280-2282

[7] Carbon-nanotube-based resonant-circuit sensor for ammonia [J].

Chopra, S ;

Pham, A ;

Gaillard, J ;

Parker, A ;

Rao, AM .

APPLIED PHYSICS LETTERS, 2002, 80 (24) :4632-4634

[8] Extreme oxygen sensitivity of electronic properties of carbon nanotubes [J].

Collins, PG ;

Bradley, K ;

Ishigami, M ;

Zettl, A .

SCIENCE, 2000, 287 (5459) :1801-1804

[9] Determining dielectric constants using a parallel plate capacitor [J].

Grove, TT ;

Masters, MF ;

Miers, RE .

AMERICAN JOURNAL OF PHYSICS, 2005, 73 (01) :52-56

[10] Application-specific sensor systems based on CMOS chemical microsensors [J].

Hierlemann, A ;

Lange, D ;

Hagleitner, C ;

Kerness, N ;

Koll, A ;

Brand, O ;

Baltes, H .

SENSORS AND ACTUATORS B-CHEMICAL, 2000, 70 (1-3) :2-11

← 1 2 3 4 →