共 49 条
[1]
[Anonymous], METHODS SURFACE ANAL
[2]
[Anonymous], PLASMA DEPOSITION TR
[3]
Banwell C.N., 1983, Fundamentals of molecular spectroscopy
[5]
Beamson G., 1993, Adv. Mater., V5, P778, DOI [DOI 10.1002/ADMA.19930051035, 10.1002/adma.19930051035]
[6]
RELATION OF POLYMER STRUCTURE TO PLASMA-ETCHING BEHAVIOR - ROLE OF ATOMIC FLUORINE
[J].
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS,
1987, 5 (04)
:1578-1584
[8]
CRAMAROSSOS F, 1982, PLASMA CHEM PLASMA P, V2, P213
[9]
CRANK J, 1968, DIFFUSION POLYM, pCH1
[10]
EHRLICH CD, 1992, J VAC SCI TECHNOL A, V10, P1, DOI 10.1116/1.578137