Growth and electrical properties of ZnO films prepared by chemical bath deposition method

被引：41

作者：

Chu, Dewei ^{[1
]}

Hamada, Takahiro ^{[2
]}

Kato, Kazumi ^{[1
]}

Masuda, Yoshitake ^{[1
]}

机构：

[1] Natl Inst Adv Ind Sci & Technol, Moriyama Ku, Nagoya, Aichi 4638560, Japan

[2] Panasonic Corp, Adv Technol Res Labs, Nanotechnol Res Lab, Seika, Kyoto 6190237, Japan

来源：

PHYSICA STATUS SOLIDI A-APPLICATIONS AND MATERIALS SCIENCE | 2009年 / 206卷 / 04期

关键词：

THIN-FILMS; TEMPERATURE; SUBSTRATE; QUALITY;

D O I：

10.1002/pssa.200824495

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

The influence of the choice of temperature, pH value, counter-ion, deposition time, and seed layer on the morphology as well as electrical properties of ZnO films grown from chemical bath deposition (CBD) are discussed. Consequently, oriented ZnO films with various microstructures can be synthesized by controlling the solution pH value and counterions. Besides, the point at which the seed layer is pre-heated at higher temperature is crucial and can lead to a significant difference in the width of crystals and electrical properties of ZnO films. (C) 2009 WILEY-VCH Vertag GmbH & Co. KGaA, Weinheim

引用

页码：718 / 723

页数：6

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