Rapid prototyping of micropatterned substrates using conventional laser printers

被引:9
作者
Branham, ML [1 ]
Tran-Son-Tay, R
Schoonover, C
Davis, PS
Allen, SD
Shyy, W
机构
[1] Univ Florida, Dept Aerosp Engn Mech & Engn Sci, Gainesville, FL 32611 USA
[2] Florida State Univ, Dept Chem & Biochem, Tallahassee, FL 32306 USA
关键词
D O I
10.1557/JMR.2002.0231
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
We demonstrated rapid prototyping of templates for replica molding using a conventional laser printer. A polymer, polydimethylsiloxane, was cast directly on the transparency templates to make the replicas. The templates and replicas were characterized by scanning electron microscopy, profilometry, and optical microscopy. Four patterns, including an Electronic Industries Association resolution test pattern, were printed on transparencies at 600 dots per inch on a HP LaserJet 4M printer (Hewlett-Packard, Palo Alto, CA). Optimal precision and clarity occurred between intensity settings of 50-100. Mean pattern height/depth ranged from 8-13 mum, and width was as small as a few tenths of a millimeter. Mean surface roughness of the template patterns ranged from 1 to 4 mum on the top surface and from 5 to 10 nm on the bare transparency surface. This method provides access to microfabricated patterns for the broader research community without the need for sophisticated micromachining facilities.
引用
收藏
页码:1559 / 1562
页数:4
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