Off-axis pulsed laser deposition system for epitaxial oxide growth on substrates up to 2 inches in diameter

被引：17

作者：

Siegert, M ^{[1
]}

Zander, W ^{[1
]}

Lisoni, J ^{[1
]}

Schubert, J ^{[1
]}

Buchal, C ^{[1
]}

机构：

[1] Forschungszentrum Julich, Inst Schicht & Ionentech, D-52425 Julich, Germany

来源：

APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING | 1999年 / 69卷 / Suppl 1期

关键词：

D O I：

10.1007/s003390051528

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

A novel off-axis pulsed-laser deposition (PLD) system for ferroelectric oxide thin films has been developed. The substrates are mounted "upside-down" and are rotating. The maximum substrate size is 2 inches in diameter. The optical and structural properties of the grown BaTiO(3) films are compared to the films produced by an on-axis PLD system. The stoichiometry and thickness were checked with Rutherford backscattering spectrometry (RBS). The crystalline quality and orientation were investigated with X-ray diffraction (XRD) and Rutherford backscattering spectrometry in channeling configuration (RBS/C). Using atomic force microscopy, the rms surface roughness was measured. The BaTiO(3) films grown on MgO form a planar optical waveguide. The optical losses and the refractive indices of these waveguides were determined with a prism coupling setup. Films grown on Id x 10 mm(2) MgO (100) substrates in on-axis geometry show optical waveguide losses less than 3 dB/cm.

引用

页码：S779 / S781

页数：3

共 14 条

[1] Stress-induced lateral confinement of light in epitaxial BaTiO3 films grown by radio-frequency magnetron sputtering [J].

Barrios, P ;

Kim, HK .

APPLIED PHYSICS LETTERS, 1998, 73 (08) :1017-1019

[2] Structural and optical characterization of epitaxial waveguiding BaTiO3 thin films on MgO [J].

Beckers, L ;

Schubert, J ;

Zander, W ;

Ziesmann, J ;

Eckau, A ;

Leinenbach, P ;

Buchal, C .

JOURNAL OF APPLIED PHYSICS, 1998, 83 (06) :3305-3310

[3] Thin film channel waveguides fabricated in metalorganic chemical vapor deposition grown BaTiO3 on MgO [J].

Gill, DM ;

Block, BA ;

Conrad, CW ;

Wessels, BW ;

Ho, ST .

APPLIED PHYSICS LETTERS, 1996, 69 (20) :2968-2970

[4] Thin-film channel waveguide electro-optic modulator in epitaxial BaTiO3 [J].

Gill, DM ;

Conrad, CW ;

Ford, G ;

Wessels, BW ;

Ho, ST .

APPLIED PHYSICS LETTERS, 1997, 71 (13) :1783-1785

[5] Pressure effects during pulsed-laser deposition of barium titanate thin films [J].

Gonzalo, J ;

San Roman, RG ;

Perriere, J ;

Afonso, CN ;

Casero, RP .

APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING, 1998, 66 (05) :487-491

[6] OFF-AXIS LASER DEPOSITION OF YBA2CU3O7-DELTA THIN-FILMS [J].

HOLZAPFEL, B ;

ROAS, B ;

SCHULTZ, L ;

BAUER, P ;

SAEMANNISCHENKO, G .

APPLIED PHYSICS LETTERS, 1992, 61 (26) :3178-3180

[7] PULSED-LASER DEPOSITION OF BATIO3 THIN-FILMS AND THEIR OPTICAL-PROPERTIES [J].

KIM, DH ;

KWOK, HS .

APPLIED PHYSICS LETTERS, 1995, 67 (13) :1803-1805

[8] Correlation between plasma dynamics and thin film properties in pulsed laser deposition [J].

Kwok, HS ;

Kim, HS ;

Kim, DH ;

Shen, WP ;

Sun, XW ;

Xiao, RF .

APPLIED SURFACE SCIENCE, 1997, 109 :595-600

[9] Microstructure and orientation relations of BaTiO3/MgO/YSZ multilayers deposited on Si(001) substrates by laser ablation [J].

Lei, CH ;

Jia, CL ;

Siegert, M ;

Schubert, J ;

Buchal, C ;

Urban, K .

JOURNAL OF CRYSTAL GROWTH, 1999, 204 (1-2) :137-144

[10] Crystalline oxides on silicon: The first five monolayers [J].

McKee, RA ;

Walker, FJ ;

Chisholm, MF .

PHYSICAL REVIEW LETTERS, 1998, 81 (14) :3014-3017

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