OFF-AXIS LASER DEPOSITION OF YBA2CU3O7-DELTA THIN-FILMS

被引:221
作者
HOLZAPFEL, B [1 ]
ROAS, B [1 ]
SCHULTZ, L [1 ]
BAUER, P [1 ]
SAEMANNISCHENKO, G [1 ]
机构
[1] UNIV ERLANGEN NURNBERG,INST PHYS,W-8520 ERLANGEN,GERMANY
关键词
D O I
10.1063/1.107951
中图分类号
O59 [应用物理学];
学科分类号
摘要
We report on YBa2Cu3O7-delta thin-film preparation by a new laser deposition geometry, the so-called off-axis laser deposition. Combined with radiation-based substrate heating, this results in c-axis oriented, epitaxial YBa2Cu3O7-delta thin films with critical current densities above 10(6) A/cm2 at 77 K and zero field and an exceptionally good surface quality, with complete absence of the otherwise observed laser droplets. As proved by atomic force microscopy, the surface roughness is < 80 angstrom over an area of at least 10 X 10 mum2. Using this off-axis geometry it is possible to coat both sides of a substrate simultaneously, providing a one-step process in double-sided thin-film deposition. Both YBa2Cu3O7-delta films on the substrate show identical superconducting properties.
引用
收藏
页码:3178 / 3180
页数:3
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