Nanoporous ultra-low-κ fluoropolymer composite films via plasma polymerization of allylpentafluorobenzene and magnetron sputtering of poly(tetrafluoroethylene)

被引：18

作者：

Fu, GD ^{[1
]}

Zhang, Y ^{[1
]}

Kang, ET ^{[1
]}

Neoh, KG ^{[1
]}

机构：

[1] Natl Univ Singapore, Dept Chem Engn, Singapore 119260, Singapore

来源：

ADVANCED MATERIALS | 2004年 / 16卷 / 9-10期

关键词：

D O I：

10.1002/adma.200306290

中图分类号：

O6 [化学];

学科分类号：

0703 ;

摘要：

Fluoropolymer composite films with nanoporous morphology and dielectric constants less than 2.0, consisting of plasma-polymerized allylpentafluorobenzene (pp-APFB) nanospheres and magnetron sputter-deposited poly (tetrafluoroethylene) (s-PTFE) dense layers, have been prepared on hydrogen-terminated Si(100) (H-Si) substrates (see Figure).

引用

页码：839 / +

页数：5

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