Fabrication of transparent p-n heterojunction thin film diodes based entirely on oxide semiconductors

被引:181
作者
Kudo, A
Yanagi, H
Ueda, K
Hosono, H
Kawazoe, H
Yano, Y
机构
[1] Tokyo Inst Technol, Mat & Struct Lab, Midori Ku, Yokohama, Kanagawa, Japan
[2] TDK Corp, R&D Ctr, Ichikawa, Chiba 2720026, Japan
关键词
D O I
10.1063/1.125171
中图分类号
O59 [应用物理学];
学科分类号
摘要
All oxide-based, transparent polycrystalline p-n heterojunctions on a glass substrate were fabricated. The structure of the diode was n(+)-ZnO electrode/n-ZnO/p-SrCu2O2/In2-xSnxO3 electrode on the substrate. The contact between the n- and p-type semiconducting oxides was found to be rectifying. The ratio of forward current to the reverse current exceeded 80 within the range of applied voltages of -1.5 to +1.5 V and the estimated diode factor (n value) was 1.62. The diode structure was fabricated on a glass plate with the total thickness of 1.3 mu m and possessed an optical transmission of 70%-80% in the visible region. (C) 1999 American Institute of Physics. [S0003-6951(99)03744-4].
引用
收藏
页码:2851 / 2853
页数:3
相关论文
共 6 条
  • [1] Room-temperature rf magnetron sputtered ZnO for electromechanical devices
    Barker, A
    Crowther, S
    Rees, D
    [J]. SENSORS AND ACTUATORS A-PHYSICAL, 1997, 58 (03) : 229 - 235
  • [2] HUMBERG I, 1986, J APPL PHYS, V60, pR123
  • [3] P-type electrical conduction in transparent thin films of CuAlO2
    Kawazoe, H
    Yasukawa, M
    Hyodo, H
    Kurita, M
    Yanagi, H
    Hosono, H
    [J]. NATURE, 1997, 389 (6654) : 939 - 942
  • [4] SrCu2O2:: A p-type conductive oxide with wide band gap
    Kudo, A
    Yanagi, H
    Hosono, H
    Kawazoe, H
    [J]. APPLIED PHYSICS LETTERS, 1998, 73 (02) : 220 - 222
  • [5] MADELUNG O, 1982, LANDOLTBORNSTEIN B, V17
  • [6] YANAGI H, IN PRESS J ELECTROCE