Simulating the behavior of MEMS devices: Computational methods and needs

被引：120

作者：

Senturia, SD

Aluru, N

White, J

机构：

[1] MIT, ELECT RES LAB, DEPT ELECT ENGN & COMP SCI, CAMBRIDGE, MA 02139 USA

[2] MIT, MICROSYST TECHNOL LABS, CAMBRIDGE, MA 02139 USA

来源：

IEEE COMPUTATIONAL SCIENCE & ENGINEERING | 1997年 / 4卷 / 01期

基金：

美国国家科学基金会;

关键词：

D O I：

10.1109/99.590854

中图分类号：

TP301 [理论、方法];

学科分类号：

081202 ;

摘要：

Technologies for fabricating a variety of MEMS devices have developed rapidly, but computational tools that allow engineers to quickly design and optimize these micromachines have not kept pace. Inadequate simulation tools force MEMS designers to resort to physical prototyping. To realistically simulate the behavior of complete micromachines, algorithmic innovation is necessary in several areas.

引用

页码：30 / 43

页数：14

共 55 条

[31]

Mikhlin S., 1960, LINEAR INTEGRAL EQUA

[32]

Mikhlin S G, 1957, INTEGRAL EQUATIONS

[33] A SPECTRAL BOUNDARY-ELEMENT APPROACH TO 3-DIMENSIONAL STOKES-FLOW [J].