High spatial resolution subsurface thermal emission microscopy

被引:61
作者
Ippolito, SB
Thorne, SA
Eraslan, MG
Goldberg, BB
Ünlü, MS
Leblebici, Y
机构
[1] Boston Univ, Dept Phys & Elect & Comp Engn, Boston, MA 02215 USA
[2] Boston Univ, Photon Ctr, Boston, MA 02215 USA
关键词
D O I
10.1063/1.1758308
中图分类号
O59 [应用物理学];
学科分类号
摘要
We apply the numerical aperture increasing lens technique to subsurface thermal emission microscopy of Si integrated circuits. We achieve improvements in the amount of light collected and the spatial resolution, well beyond the limits of conventional thermal emission microscopy. We experimentally demonstrate a lateral spatial resolution of 1.4 mum and a longitudinal spatial resolution of 7.4 mum, for thermal imaging at free space wavelengths up to 5 mum. (C) 2004 American Institute of Physics.
引用
收藏
页码:4529 / 4531
页数:3
相关论文
共 13 条
  • [1] Immersion lens microscopy of photonic nanostructures and quantum dots
    Bennett, B
    Goldberg, S
    Ippolito, B
    Novotny, L
    Liu, ZH
    Ünlü, MS
    [J]. IEEE JOURNAL OF SELECTED TOPICS IN QUANTUM ELECTRONICS, 2002, 8 (05) : 1051 - 1059
  • [2] Born M., 1999, PRINCIPLES OPTICS, P465
  • [3] Coherent emission of light by thermal sources
    Greffet, JJ
    Carminati, R
    Joulain, K
    Mulet, JP
    Mainguy, SP
    Chen, Y
    [J]. NATURE, 2002, 416 (6876) : 61 - 64
  • [4] High spatial resolution subsurface microscopy
    Ippolito, SB
    Goldberg, BB
    Unlü, MS
    [J]. APPLIED PHYSICS LETTERS, 2001, 78 (26) : 4071 - 4073
  • [5] Thermal imaging and measurement techniques for electronic materials and devices
    Kolzer, J
    Oesterschulze, E
    Deboy, G
    [J]. MICROELECTRONIC ENGINEERING, 1996, 31 (1-4) : 251 - 270
  • [6] HIGH-RESOLUTION TEMPERATURE-MEASUREMENT OF VOID DYNAMICS INDUCED BY ELECTROMIGRATION IN ALUMINUM METALLIZATION
    KONDO, S
    HINODE, K
    [J]. APPLIED PHYSICS LETTERS, 1995, 67 (11) : 1606 - 1608
  • [7] Influence of local heating on micro-Raman spectroscopy of silicon
    Kouteva-Arguirova, S
    Arguirov, T
    Wolfframm, D
    Reif, J
    [J]. JOURNAL OF APPLIED PHYSICS, 2003, 94 (08) : 4946 - 4949
  • [8] Scanning thermal microscopy
    Majumdar, A
    [J]. ANNUAL REVIEW OF MATERIALS SCIENCE, 1999, 29 : 505 - 585
  • [9] Reflected image of a strongly focused spot
    Novotny, L
    Grober, RD
    Karrai, K
    [J]. OPTICS LETTERS, 2001, 26 (11) : 789 - 791
  • [10] Allowed and forbidden light in near-field optics .1. A single dipolar light source
    Novotny, L
    [J]. JOURNAL OF THE OPTICAL SOCIETY OF AMERICA A-OPTICS IMAGE SCIENCE AND VISION, 1997, 14 (01): : 91 - 104