Observing hydrogen silsesquioxane cross-linking with broadband CARS

被引：24

作者：

Caster, Allison G. ^{[1
,2
]}

Kowarik, Stefan ^{[1
,2
]}

Schwartzberg, Adam M. ^{[1
,2
]}

Nicolet, Olivier ^{[3
]}

Lim, Sang-Hyun ^{[4
]}

Leone, Stephen R. ^{[1
,2
]}

机构：

[1] Univ Calif Berkeley, Dept Chem & Phys, Berkeley, CA 94720 USA

[2] Univ Calif Berkeley, Lawrence Berkeley Lab, Berkeley, CA 94720 USA

[3] Nestle Prod Technol Ctr, CH-1350 Orbe, Switzerland

[4] Univ Texas Austin, Dept Chem & Biochem, Austin, TX 78712 USA

来源：

JOURNAL OF RAMAN SPECTROSCOPY | 2009年 / 40卷 / 07期

关键词：

coherent anti-Stokes Raman scattering; CARS; hydrogen silsesquioxane; POSS; photolithography; FILMS; RESIST; LASER;

D O I：

10.1002/jrs.2190

中图分类号：

O433 [光谱学];

学科分类号：

0703 ; 070302 ;

摘要：

Broadband coherent anti-Stokes Raman scattering microscopy (CARS microscopy) is used for real-time measurements of in situ cross-linking of the photoresist material hydrogen silsesquioxane (HSQ). Using samples baked at different temperatures, and therefore cross-linked to varying degrees, characteristic Raman bands are identified for the open 'cage' structure (345 cm(-1), 454 cm(-1) and 562 cm(-1)) as well as the cross-linked 'network' structure (484 cm(-1)). Cross-linking can also be induced by absorption of high intensity near-infrared (IR) laser light (similar to 10(13) W cm(-2)) and followed in real time by monitoring the characteristic Raman bands. Using the time resolution of CARS to follow the HSQ reaction during the laser exposure, a two-stage kinetic process is observed and associated time constants of 20 +/- 10 s and 3 +/- 1 min are determined for the IR laser-induced cross-linking in films of similar to 1 mu m thickness. Copyright (C) 2009 John Wiley & Sons, Ltd.

引用

页码：770 / 774

页数：5

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