MEMS/NEMS development for space applications at NASA/JPL

This paper presents an overview of the current technology development activities of the MEMS Technology Group at JPL. The group, in collaboration with other research groups at JPL and outside institutions, pursues the development of a wide range of MEMS/NEMS technologies that are primarily applicable to NASA's needs in the area of robotic planetary exploration. The broad classes of technologies being developed include inertial guidance devices, micro-propulsion devices, adaptive optics for telescope applications, micro-instruments and nano-mechanical resonator devices. End-to-end prototype development of these MEMS/NEMS technologies is conducted at JPL's state-of-the-art Microdevices Laboratory. The group is also pursuing the establishment of a rapid, space-testing program in collaboration with the Aerospace Corporation, in an effort to overcome the traditional barriers to the insertion of new technologies into space missions.