Nanosized thin films of tungsten-titanium mixed oxides as gas sensors

被引：36

作者：

Ferroni, M

Boscarino, D

Comini, E

Gnani, D

Guidi, V

Martinelli, G

Nelli, P

Rigato, V

Sberveglieri, G

机构：

[1] Univ Ferrara, Dipartimento Fis, Semicond & Sensor Grp, I-44100 Ferrara, Italy

[2] Univ Ferrara, INFM, I-44100 Ferrara, Italy

[3] Univ Brescia, Dipartimento Chim & Fis Mat, Gas Sensor Lab, I-25133 Brescia, Italy

[4] Univ Brescia, INFM, I-25133 Brescia, Italy

[5] Ist Nazl Fis Nucl, Lab Nazl Legnaro, I-35020 Legnaro, Italy

[6] Ist Nazl Fis Nucl, I-44100 Ferrara, Italy

来源：

SENSORS AND ACTUATORS B-CHEMICAL | 1999年 / 58卷 / 1-3期

关键词：

tungsten oxide; titanium oxide; gas sensor; sputtering r.f;

D O I：

10.1016/S0925-4005(99)00146-X

中图分类号：

O65 [分析化学];

学科分类号：

070302 ; 081704 ;

摘要：

Micro-structural and electrical investigation is carried out over nanosized thin film of titanium and tungsten mixed oxides as gas-sensors. Films were prepared by r.f. reactive sputtering assisted by annealing in dry air. Electron microscopy techniques and RES measurements revealed the structural features of these novel film while their sensing properties were tested to NO2, CO and methanol. These layers exhibit enhanced sensitivity and selectivity to NO2 with respect to previously investigated Ti-W-O films. (C) 1999 Elsevier Science S.A. All rights reserved.

引用

页码：289 / 294

页数：6

共 7 条

[1] Microstructural characterization of a titanium-tungsten oxide gas sensor [J].