PZT MEMS ACTUATED FLAPPING WINGS FOR INSECT- INSPIRED ROBOTICS

被引:42
作者
Bronson, J. R. [1 ]
Pulskamp, J. S. [2 ]
Polcawich, R. G. [2 ]
Kroninger, C. M. [2 ]
Wetzel, E. D. [2 ]
机构
[1] Oak Ridge Associated Univ, Oak Ridge, TN 37830 USA
[2] US Army Res Lab, Adelphi, MD 20783 USA
来源
IEEE 22ND INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS 2009) | 2009年
关键词
D O I
10.1109/MEMSYS.2009.4805566
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
This paper presents microfabricated flapping-wings for insect-inspired flying robots. To the authors' knowledge, this is the first report of any such MEMS devices for this application. This work is a component of on-going efforts by the US Army Research Laboratory (ARL) in developing millimeter-scale robotic platforms using thin-film lead zirconium titanate (PZT) actuators. Micromachined wing-structures have been successfully fabricated and this report presents experimental results of flapping frequency and stroke-amplitude from a set of wing designs varying in material composition and dimensions. These results establish the feasibility of achieving stroke amplitudes comparable to insects with PiezoMEMS technology.
引用
收藏
页码:1047 / 1050
页数:4
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