Enhanced instability of strained alloy films due to compositional stresses

被引:68
作者
Spencer, BJ [1 ]
Voorhees, PW
Tersoff, J
机构
[1] SUNY Buffalo, Dept Math, Buffalo, NY 14214 USA
[2] Northwestern Univ, Dept Mat Sci & Engn, Evanston, IL 60208 USA
[3] IBM Corp, Div Res, TJ Watson Res Ctr, Yorktown Heights, NY 10598 USA
关键词
D O I
10.1103/PhysRevLett.84.2449
中图分类号
O4 [物理学];
学科分类号
0702 ;
摘要
A single-component strained film is known to be unstable to the stress-driven morphological instability. Here, we determine how the instability is modified in an alloy film by considering the effect of compositional stresses due to an atomic size difference. We find that the coupling of composition to stress always makes the film more unstable to the formation of stress-driven surface undulations. The destabilization is greatest over a range of intermediate deposition rates.
引用
收藏
页码:2449 / 2452
页数:4
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