High-current ECR ion source

被引：7

作者：

Voronin, G ^{[1
]}

Solnyshkov, D ^{[1
]}

Svinin, M ^{[1
]}

Solnyshkov, A ^{[1
]}

机构：

[1] DV Efremov Sci Res Inst Electrophys Apparatus, St Petersburg 189631, Russia

来源：

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS | 2000年 / 161卷

关键词：

ion source; beam; oxygen; microwave; discharge;

D O I：

10.1016/S0168-583X(99)00988-X

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

The ECR ion source is designed for the production of high-current ion beams of various gaseous elements. The ion source consists of a cylindrical discharge chamber, solenoidal coils for generation of the magnetic field along the chamber axis. three electrode accel-decel ion extraction system and a microwave power supply system. Beams of oxygen, nitrogen and hydrogen ions with a current up to 75 mA have been produced. The atomic ion content of the beam exceeds 70%. (C) 2000 Published by Elsevier Science B.V. All rights reserved.

引用

页码：1118 / 1122

页数：5

共 4 条

[1] NIKIFOROV S, P EPAC 94, V3, P1427
[2] ELECTRON-CYCLOTRON RESONANCE SOURCES FOR WIDE AND NARROW PLASMA STREAMS
POPOV, OA
WESTNER, AO
[J]. REVIEW OF SCIENTIFIC INSTRUMENTS, 1990, 61 (01) : 303 - 305
[3] VERY HIGH-CURRENT ECR ION-SOURCE
SHIMADA, M
WATANABE, I
TORII, Y
[J]. NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1989, 39 (1-4) : 242 - 245
[4] A HIGH-CURRENT DENSITY AND LONG LIFETIME ECR SOURCE FOR OXYGEN IMPLANTERS
TORII, Y
SHIMADA, M
WATANABE, I
HIPPLE, J
HAYDEN, C
DIONNE, G
[J]. REVIEW OF SCIENTIFIC INSTRUMENTS, 1990, 61 (01) : 253 - 255

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